Ultra-Pure Water System at the Siwei Science and Innovation Park Base of the 29th Research Institute of China Electronics Technology Group Corporation

Project Overview: To meet the stringent requirements for ultrapure water in high-end research and production, the 29th Research Institute of China Electronic Technology Corporation (CETC) introduced an ultrapure water system with a production capacity of 20 m³/h at its Siwei Science and Innovation Park base. As a critical infrastructure of the base, this system provides a stable and reliable supply of ultrapure water for chip manufacturing, precision instrument cleaning, advanced material R&D, and other processes.

Solution: The system employs a mature process combining dual-stage reverse osmosis (RO) with electrodeionization (EDI) and terminal polishing mixed-bed units. Multi-stage pre-filtration effectively removes impurities from the raw water; RO membranes provide high-efficiency desalination; and the subsequent EDI module continuously produces high-purity water without the need for chemical regeneration. Finally, the polishing mixed-bed ensures the produced water consistently achieves a resistivity of 18.2 MΩ·cm or higher, fully complying with the rigorous standards for electronic-grade ultrapure water.

Application Results: Since commissioning, the ultrapure water system has performed excellently, delivering stable water quality and sufficient volume. It has significantly enhanced the water security and efficiency of the base's R&D and production processes. Its efficient and environmentally friendly operation provides robust support for the 29th Research Institute's needs for independent innovation, R&D, and manufacturing in the field of electronic information technology, ensuring the reliability of key processes and the high quality of products.