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In nanoscale manufacturing processes, chip line widths reach several nanometers. Even the slightest contamination can lead to short circuits, open circuits, or performance degradation. Substandard ultrapure water quality can reduce product yield and increase production costs, or even cause the entire batch of products to be scrapped. For semiconductor companies, a stable and reliable supply of ultrapure water is the guarantee of stable and reliable production capacity. First, its purity is extremely high, with resistivity typically required to reach 18.2 MΩ·cm, close to the theoretical limit of pure water. Second, impurity control is extremely strict. The content of particles, metal ions, organic matter, and silica in the water needs to be controlled at the ppb (parts per billion) or even ppt (parts per trillion) level. Furthermore, bacteria and pyrogens must be completely removed, as any microbial residue will affect chip performance.
1. Wafer cleaning: Chip manufacturing involves dozens or even hundreds of processes. Before and after each process, the wafer surface must be cleaned with ultrapure water to remove tiny particles and chemical residues, ensuring surface cleanliness.
2. Photolithography and Etching: In the photoresist coating, development, and wet etching processes, ultrapure water acts as a solvent and rinsing medium, directly affecting the precision and consistency of the pattern.
3. Chemical Dilution: Many high-purity chemical reagents require precise dilution with ultrapure water; even slight deviations in the ratio can affect the process results.
4. Equipment Cooling: Some precision equipment also uses ultrapure water circulation cooling to prevent impurities in ordinary water from corroding or clogging pipelines.
In short, the quality of ultrapure water directly determines the yield rate and performance stability of chips.
As an ultrapure water equipment manufacturer specializing in R&D and manufacturing for 23 years, UPU deeply understands the stringent water quality requirements of the semiconductor industry and has accumulated rich practical experience. Our ultrapure water systems are designed strictly according to semiconductor industry standards, with stable output water quality meeting resistivity ≥18.2 MΩ·cm, and all impurity indicators meeting or exceeding industry standards, providing reliable water quality assurance for chip manufacturing.
With over two decades of dedicated experience and solid technical expertise, we keep pace with the semiconductor industry's development, continuously optimizing process routes and equipment performance. Our deep technical accumulation and mature, reliable solutions have earned us widespread acclaim.
Our UPU water purifiers are widely used by numerous domestic semiconductor companies, wafer fabs, and electronic component manufacturers, covering different process levels and production capacities. We have accumulated rich experience in project implementation and have received consistent praise from our clients.